Like Driving a Car: Acquiring Quality SEM/FESEM Images in Different Situations
2022.09.16 Bangzhi Liu, Materials Research Institute, Penn State University
This presentation is made available by the The Nanotechnology Applications and Career Knowledge (NACK).
Information on the NACK Network can be found at: https://www.cneu.psu.edu/ and https://nano4me.org
Getting good SEM/FESEM images is dependent on both the sample conditions (conductivity, bulk vs. thin film, etc) and the instrument’s imaging parameters (e.g., beam voltage, beam current, working distance, detector, etc). Over the course of training and interacting with hundreds of different FESEM users Dr. Liu has observed the most important things a new user needs to know without overwhelming them with theory and trivial operational routines. This allows new users to conceptualize and visualize the electron beam behavior relative to the observed imaging. This webinar will simplify and explain the complex nature of SEM/FESEM imaging by drawing analogies to common things in everyday life such as writing with a pencil and driving a car.
Table of Contents:
00:00 Like driving a car: acquiring quality SEM/FESEM images in different situations
00:28 About me
01:25 Dalian
02:17 Outline
02:57 Springtail cuticles Sample curtesy: Lin Wang
03:39 Etched Si mushroom structure Sample curtesy: Lin Wang
03:49 Slide 7: Untitled
04:46 Etched Si grating Sample curtesy: Fabin Grise
05:44 WSe2/Graphene 0.2KV
06:32 MoS2/0.2KV Sample curtsey: Kevin Lu
06:48 3D printed nanostructure/2 kV Sample curtsey: Jiho Noh
07:19 Charging effect
08:19 Polystyrene latex coated with Au
09:16 Untitled: Slide 14
09:27 SE2 1KV/7.1mm
09:53 Outline
10:28 Key imaging parameters
10:37 Working Distance (WD) Smaller WD, better resolution
11:14 Working distance & detectors
12:54 Choice of detectors
13:54 Untitled: Slide 21
14:07 Choice of beam voltage
15:15 Electron and sample interaction
15:36 Zeiss: Low-voltage SEM-beyond sample topography (Dr. Iwona Jozwik)
16:15 Zeiss: Low-voltage SEM-beyond sample topography (Dr. Iwona Jozwik)
16:32 WSe2/0.5 kV
16:51 Block Copolymer Sample Curtesy: Karthik Arunagiri
17:28 20% Ce on Al2O3 particle
18:24 X-ray emission & EDS
18:39 Device EDS Mapping
18:50 Outline
18:54 Merlin
18:58 G500
19:43 G500: Excellent resolution at low KV
20:13 GEMINI I column (G500)
20:32 GEMINI II column (Merlin)
21:43 Ultra
22:07 Outline
22:35 A simplified ray diagram of SEM
23:25 Scanning-move the beam!
24:24 Magnification?
25:11 Merlin: Large field of view
25:25 Ideal beam?
25:54 Electron beam is a probe, just like your pencil
26:16 Tip size matters!
26:53 Tip shape matters too!
27:32 How does the beam shape affect SEM image?
28:06 Ideal beam?
28:34 How to achieve sharp beam on FESEM?
29:46 - focus
29:54 Which component control beam shape?
31:22 - Stigmation/stigmatism
31:30 Mechanism to correct stigmation Stigmators x/y
32:15 Ray diagram of a stigmated lens
34:29 under
35:23 How to correct stigmation
36:26 How to test when stigmation is corrected?
37:08 - stigmation
37:15 Why straight beam?
37:28 What happens when aperture is off?
37:47 How do you know when aperture is off?
38:57 - x/y alignment
40:01 5 controls needed to correct the beam
40:48 Questions?
50:56 The Nanofabrication Lab
This resource and related downloads can be found at: https://nanohub.org/resources/36614
Watch video Like Driving a Car: Acquiring Quality SEM/FESEM Images in Different Situations online without registration, duration hours minute second in high quality. This video was added by user nanohubtechtalks 22 November 2022, don't forget to share it with your friends and acquaintances, it has been viewed on our site 313 once and liked it 7 people.