Like a camera that captures scenes on film with light,
photo lithography is the process of drawing patterns on a wafer. 📸
However, as the size of the pattern to be drawn gets smaller and smaller, the photo lithography reaches its limit.
That’s where the ‘EUV’ comes in.
EUV is an ultra-precise technology that utilizes plasma, more than just a simple light.
Let’s find out more about it with Samsung Semiconductor in just 5 minutes! 🧐
📌 Time Stamps
00:00 Prologue
00:44 What is the photo lithography?
01:10 Types of PR
01:34 The Properties and Limitations of Light
01:52 M.P.T (Multi-Patterning Technology)
02:27 O.P.C (Optical Proximity Correction)
02:51 Reducing the wavelength of light
03:17 EUV
03:51 Features of EUV! Reflection
04:06 Change of mask
04:18 Operation of EUV facilities
04:39 Comparison of ArF and EUV
04:57 Change brought by EUV
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